Portable high resolution scanning electron microscope column using permanent magnet electron lenses
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Nov 20, 2001
Issued Date -
N/A
app pub date -
May 2, 2000
filing date -
Sep 27, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A detachable, portable SEM column that is easily disconnected from the electron gun assembly and specimen chamber of the system, allowing different column designs to be used in a given SEM system. As an alternate design, the electron gun and column are configured as a single detachable, portable assembly. The column of the present invention contains a condenser lens and an objective lens, both designed employing permanent magnet elements for primary field generation. Relatively small coils are used for scanning and precise adjustment of focus.
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