Procedure for producing isolation copper facing membrane

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United States of America Patent

PATENT NO 6316056
SERIAL NO

09390656

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Abstract

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A method for producing isolation copper facing membranes, in which the basic material is the 'polyimide' isolation membrane 'KAPTON', includes the steps of: cleaning the 'polyimide' isolation membrane 'KAPTON' using a high pressure air stream to remove dust from the board; placing the board in a vacuum facing copper chamber, the pressure in the vacuum facing copper device should be kept at about 1.times.10.sup.-3 Torr, and then Argon and Oxygen, at a ratio of 1:3, should be inserted; the vacuum pressure should then be adjusted to about 5.times.10.sup.-3 Torr; facing copper is produced by spreading for 5 minutes, producing a thin CuO membrane on the 'polyimide' isolation membrane 'KAPTON'; the CuO membrane on the 'polyimide' isolation membrane is placed into another vacuum with only Argon and the pressure is maintained at about 1.times.10.sup.-3 Torr.

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Patent Owner(s)

Patent OwnerAddress
HELIX TECHNOLOGY INCHSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Si-Chung Taipei, TW 3 4

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