Premix burner with firing rate control
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United States of America Patent
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-
Nov 6, 2001
Grant Date -
N/A
app pub date -
Mar 9, 2000
filing date -
Apr 19, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
A premix burner apparatus includes a burner structure and a firing rate control system. The burner structure defines a premix reaction zone configured to communicate with a process chamber. The burner structure further defines a plurality of separate entrances to the reaction zone, and a corresponding plurality of separate premix flow paths, each of which is configured to direct both oxidant and fuel to a respective one of the entrances to the reaction zone. The firing rate control system is operative to control flows of oxidant and fuel along at least one of the flow paths separately from flows of oxidant and fuel along at least one other flow path.
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