Turbo molecular pump
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 6, 2001
Grant Date -
N/A
app pub date -
Aug 4, 1998
filing date -
Aug 13, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A turbo molecular pump comprises an electric component section having a motor, a base section supporting the electric component section, a shaft rotationally driven by the motor, and an impeller connected to the shaft for rotation therewith. A first cover member is connected to a lower portion of the base section. A second cover member is disposed in a lower portion of the electric component section and in contact with the first cover member for transferring heat generated within the electric component section to an exterior of the turbo molecular pump through the first cover member.
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