Resistor array devices including switch contacts operated by microelectromechanical actuators and methods for fabricating the same
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United States of America Patent
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Oct 30, 2001
Grant Date -
N/A
app pub date -
Apr 5, 2000
filing date -
Apr 5, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Resistor networks, digital potentiometers and microelectromechanical structures that include a plurality of resistors selectable by a plurality of microelectromechanical actuators are provided. More particularly, a thermal relay type of actuator is provided as a switch which may selectively control which of the plurality of resistors is connected. In one particularly advantageous embodiment, the heater for the thermal relay and the plurality of resistors are formed from a common layer of the integrated circuit structure, such as a doped polysilicon layer, which may simplify the manufacturing process. Preferably, a thermal arched beam actuator is utilized in combination with film resistors to provide an integrated circuit device suitable for applications such as digital potentiometers.
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