Variable height sensor tree

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United States of America Patent

PATENT NO 6305235
SERIAL NO

09168607

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A variable position sensing device is provided. The device includes a fixed track attached to a track holder. An adjustable sensor holder is adapted to receive a sensor and is capable of sliding and locking into position on the fixed track. The sensor device has particular applicability and the semiconductor manufacturing industry for setting sensors at different positions in a liquid chemical holding vessel.

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Patent Owner(s)

Patent OwnerAddress
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE75007 PARIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cooper, David G Garland, TX 32 341
Geurian, John D Garland, TX 1 2
Hong, Xuong P Mesquite, TX 1 2

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