Reticle having assist feature between semi-dense lines
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United States of America Patent
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Oct 16, 2001
Grant Date -
N/A
app pub date -
Dec 27, 1999
filing date -
Dec 27, 1999
priority date (Note) -
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Abstract
A reticle having an assist feature between semi-dense lines is described. The reticle has two adjacent, substantially parallel, and substantially equally spaced line segments of which each representing a portion of a main feature having a line width, between two adjacent line segments of the group having a gap space, wherein the gap-space/line-width ratio is equal to about 3-6.5. Between the two adjacent line segments, at least one inside assist feature is located. At the outside edges of the extreme left-hand and right-hand line segments, two outside assist features are located, respectively, wherein each of the two assist features has a first width and is spaced apart from the nearest line segment by a distance.
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