Film or coating deposition on a substrate
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United States of America Patent
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Oct 2, 2001
Issued Date -
N/A
app pub date -
Nov 24, 1999
filing date -
May 29, 1997
priority date (Note) -
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Abstract
A method of depositing a material onto a substrate, comprising the steps of: feeding a material solution to an outlet to provide a stream of droplets of the material solution; applying a potential difference between the outlet and a substrate to electrostatically attract the droplets from the outlet towards the substrate such that a corona discharge is formed around the outlet; heating the substrate to provide an increase in temperature between the outlet and the substrate; and progressively increasing the temperature of the substrate during material deposition.
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