High temperature resistant thin-film system

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United States of America Patent

PATENT NO 6291889
SERIAL NO

09167815

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Abstract

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A thin-film microcircuit resistant to high temperatures comprises a substrate fabricated of high-purity, densely packed alumina ceramic with a fine grain size, and metallization deposited thereon. The high temperature resistance is further improved by applying a vacuum anneal to the metallization. The present invention allows a glass fusing process to bond adjacent substrate layers together in forming a multi-layer module. The multi-layer modules integrate infrared detector arrays to signal conditioning circuitry. The prior art thin-film microcircuits were susceptible to damage from the glass fusing process, where the melting point of the glass reached 600.degree. C.

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Patent Owner(s)

Patent OwnerAddress
NORTHROP GRUMMAN SYSTEMS CORPORATION2980 FAIRVIEW PARK DRIVE FALLS CHURCH VA 22042-4511

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koh, Wei Irvine, CA 16 234
Louie, Wesley J Redondo Beach, CA 2 1

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