Polishing machine
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United States of America Patent
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-
Sep 18, 2001
Grant Date -
N/A
app pub date -
Feb 22, 2000
filing date -
Feb 26, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The polishing machine is capable of preventing fine vibrations of a polishing face of a polishing plate. In the polishing machine, a plate holder is rotatably provided to a base. The polishing plate is mounted on the plate holder, and an upper face of the polishing plate is covered with a polishing cloth as the polishing face. A press unit presses a surface of a work piece onto the polishing face of the polishing plate so as to polish the surface of the work piece like a mirror face. A fluid bearing rotatably supports the plate holder by fluid pressure, at a position between the plate holder and the base, so as to keep the polishing face of the polishing plate flat.
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