Method of fabricating film for solar cells
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United States of America Patent
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Aug 28, 2001
Grant Date -
N/A
app pub date -
Oct 8, 1999
filing date -
Oct 9, 1998
priority date (Note) -
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Abstract
A method of fabricating Cu.alpha.(In.sub.x Ga.sub.1-x).beta.(Se.sub.y S.sub.1-y).gamma. films for solar cells includes forming an electrode on a substrate and supplying the substrate and electrode with Cu, In, Ga, Se, and S to form a Cu.alpha.(In.sub.x Ga.sub.1-x).beta.(Se.sub.y S.sub.1-y).gamma. film. Simultaneously with the supplying of Cu, In, Ga, Se and S, the substrate is supplied with water vapor or a gas that contains a hydroxyl group.
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