Micro cooling engine array system
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United States of America Patent
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Aug 14, 2001
Grant Date -
N/A
app pub date -
Dec 8, 1999
filing date -
Dec 8, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro cooling engine array system is fabricated by micro electro mechanical system technology for cooling heat sources. The micro cooling engine array system includes a matrix, which is laminated by several layers of metal or polymer. A plurality of cooling engines are arrayed in the matrix for pumping heat out of heat sources. Each cooling engine of the array system has an expansion space, regenerator, and compression space. Pairs of plane coil and magnetic region actuate two flexible diaphragms to expand the expansion space and compress the compression space. The heat of heat sources can thus be pumped out by the array system repeatedly changing the volumes of the expansion and compression spaces.
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