Liquid delivery system and its use for the delivery of an ultrapure liquid
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United States of America Patent
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-
Jul 31, 2001
Grant Date -
N/A
app pub date -
Feb 3, 2000
filing date -
Feb 26, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
The liquid to be delivered leaves a container (3A, 3B) maintained at a first overpressure P1, from where it is transferred to an intermediate storage tank (11) maintained at a predetermined intermediate pressure P2>P1. Several small-volume delivery containers (12A, 12B), each of which may be pressurized either to a delivery pressure P3>P2 or to a filling pressure P4
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