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Abstract

A semiconductor electrostatic device for producing an output electrostatic force includes an active element, an opposed field element and a control element. The active element has a semiconductor region containing carriers movable in response to an applied electrostatic field only when the field exceeds a predetermined threshold level. The field element generates the electrostatic field and applies the field to the semiconductor region of the active element. A control element controls the electrostatic field to selectively exceed the threshold level so as to localize the carriers within the semiconductor region to thereby generate an output electrostatic force. The device may be configured to output a useful electrostatic force exceeding the inverse of the squared value of the distance between the active element and the field element. Either the active element or the field element of the semiconductor electrostatic device may be configured to be movable in response to the output electrostatic force and the movable element may be used in many applications requiring a movable element, including a mechanical switch, a valve, an electric switch, or a shutter for an optical device. The electrostatic force may be alternatively be used to attract and fix or test a workpiece. In this configuration, the semiconductor electrostatic device may be used for handling or for testing a workpiece, such as a semiconductor wafer.

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First Claim