Millimeter wave measurement process
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United States of America Patent
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Jul 3, 2001
Grant Date -
N/A
app pub date -
Dec 29, 1995
filing date -
Jan 4, 1995
priority date (Note) -
Expired
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Abstract
With the help of the millimeter wave measurement system, the surface impedance is determined by means of one or a plurality of resonators with very high three dimensional resolution when there are relatively large resonator openings in the millimeter wave range. By means of this, structures with measurements of 1/10 the resonator openings can be solved with no trouble (FIG. 1).
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