Vacuum processing apparatus and semiconductor manufacturing line using the same
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United States of America Patent
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Jun 26, 2001
Grant Date -
N/A
app pub date -
Oct 30, 1998
filing date -
Jul 19, 1995
priority date (Note) -
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status (Latency Note)
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Abstract
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
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