Beam-type accelerometer
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United States of America Patent
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Jun 26, 2001
Grant Date -
N/A
app pub date -
Nov 5, 1999
filing date -
May 7, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An accelerometer has a cantilevered beam supported at one end and having an opposite free end, with an inertial, sensing mass mounted at the free end of the beam. The beam is formed of a piezoelectric layer and a supporting layer. The ratio of the thickness of the piezoelectric layer relative to the thickness of the supporting layer is in a range between 2 and 4. The ratio of the modulus of elasticity of the material forming the supporting layer relative to the modulus of elasticity of the material forming the piezoelectric layer is in a range between 8 and 12.
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