Method of liquid treatment of microstructures comprising bendable structural members
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United States of America Patent
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Jun 26, 2001
Grant Date -
N/A
app pub date -
May 5, 1998
filing date -
Jun 30, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Microstructures, including a plurality of spaced structural members which are bendable under an external force, undergo a treating method using a first treating liquid, to prevent permanent deformation, by removing the microstructure from the first treating liquid to an environment having a pressure less than atmospheric pressure; or moving the microstructure from the first treating liquid to a second treating liquid having a smaller surface tension than the first treating liquid, and then removing the microstructure from the second liquid; or drying the microstructure removed from the first treating liquid by exposing same to a liquid vapor having a smaller surface tension than the first treating liquid; or removing the microstructure from the first treating liquid to the atmosphere, and drying the microstructure using an energy beam of high intensity or an ultrasonic wave.
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