Vacuum exhaust system
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United States of America Patent
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-
Jun 26, 2001
Grant Date -
May 31, 2001
app pub date -
Feb 18, 1999
filing date -
Feb 18, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A vacuum exhaust system can improve the operating efficiency of the vacuum exhaust system while reducing the system cost, to quickly attain a vacuum in the auxiliary chambers without increasing the size of the vacuum pumps. The vacuum exhaust system comprises a first pumping section and a second pumping section disposed downstream of and in series with the first pumping section. A main exhaust passage is provided to communicate a main chamber with a suction port of the first pumping section, and an auxiliary exhaust passage is provided to communicate an auxiliary chamber with a suction port of the second pumping section.
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