Importance

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Abstract

In one embodiment of the present invention, the ion optics for use with an ion source have first and second electrically conductive grids having mutually aligned respective pluralities of apertures through which ions may be accelerated and wherein each has an integral peripheral portion. There is also a support member. There are first and second series of seats around the respective peripheral portions of the first and second grids. A plurality of first spherical insulators are distributed between seats of the first and second series, thereby establishing a predetermined distance between the grids while still enabling radial movement between their peripheral portions. There are third and fourth series of seats around the support member and the peripheral portion of the second grid, respectively, with seats of the fourth series displaced from those of the second series in the same grid. A plurality of second spherical insulators are distributed between seats of the third and fourth series, thereby establishing a predetermined distance between the support member and the second grid while still enabling motion in at least the radial direction between the support member and the peripheral portion of the second grid. A clamping force between the support member and the peripheral portion of the first grid maintains contact between the insulators and their seats.

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First Claim