Polishing system including a hydrostatic fluid bearing support
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United States of America Patent
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Jun 12, 2001
Issued Date -
N/A
app pub date -
Jun 1, 2000
filing date -
Nov 5, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A polishing system such as a chemical mechanical belt polisher includes a hydrostatic fluid bearing that supports polishing pads and incorporates one or more of the following novel aspects. One aspect uses compliant surfaces surrounding fluid inlets in an array of inlets to extend areas of elevated support pressure around the inlets. Another aspect of the invention provides a hydrostatic bearing with spiral or partial cardiod drain grooves. This bearing has a non-uniform support pressure profile but provides a uniform average pressure to a wafer that is rotated relative to the center of the bearing.
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