Wafer and transport system
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United States of America Patent
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Jun 5, 2001
Grant Date -
N/A
app pub date -
Jul 29, 1999
filing date -
Dec 28, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A transport system for transporting substrate wafer, for making semiconductor integrated circuits and liquid crystal display panels and the like advanced devices, is presented.
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