Exhauster pressure control system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
May 29, 2001
Grant Date -
N/A
app pub date -
May 26, 2000
filing date -
Jun 25, 1999
priority date (Note) -
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Abstract
An exhauster pressure control system capable of keeping the gas pressure constant regardless of variation in the flow rate of the gas to be controlled. An inlet port 22 and an outlet port 24 are formed in a main body 20 and a spool 40 is held against sliding surfaces 29a and 29b by a spring 28. A pilot chamber 30 is located below the spool 40 and an internal pressure of the pilot chamber is held above a gas pressure at the inlet port 22. A pressure sensor S to detect the gas pressure at the inlet port 22, a control valve V to supply regulating gas to the pilot chamber 30 and a control circuit C to drive the control valve V according to an output of the pressure sensor are provided outside the main body 20, wherein the gas pressure at the inlet port 22 as detected by the pressure sensor S is fed back to the control circuit C, thereby actuating the control valve V to supply regulating gas to the pilot chamber.
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