Micro-machined device for fluids and method of manufacture
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United States of America Patent
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May 29, 2001
Grant Date -
N/A
app pub date -
Apr 1, 1999
filing date -
Oct 3, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to a micro-machined fluid-flow device (10) comprising a substrate (12) possessing a flow duct (14), a deformable thin layer (18) such a pump membrane or a valve-forming membrane. According to the invention, the thin layer (18) is a rolled metal sheet, preferably made of titanium, and connected to the substrate (12) in the zone (20) overlapping the flow duct, by an anodic bonding. The invention is applicable to making a valve.
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