Wire-sawing machine

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6237585
SERIAL NO

09488906

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Abstract

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An ingot 9 is sliced to wafers by a wire 5 which travels around grooved rollers 1 to 3. A tension applied to the wire 5 is detected by tension sensors 21, while vertical displacement of dancer rollers 19 is detected by position sensors 20. At least one of a fluctuation gap of the tension, a fluctuating velocity of the tension, an acceleration of the fluctuation, vertical movement of the dancer rollers 19, a velocity of the vertical movement and acceleration of the vertical movement is calculated from the detection results, and compared with a threshold in a calculating circuit 23 to judge a sign predicting abnormal increase of the tension. When the predicting signal appears, a command signal is outputted from the calculating circuit 22 to a controller 23 to stop operation of a wire-sawing machine or to relax the wire 5. Since rupture of the wire 5 is prevented in bud, a wire-sawing machine is efficiently driven for slicing the ingot 9 with a high productivity.

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Patent Owner(s)

Patent OwnerAddress
SUPER SILICON CRYSTAL RESEARCH INSTITUTE CORPANNAKA-SHI GUNMA-KEN 379-0125

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asakawa, Keiichiro Annaka, JP 11 103
Matsuzaki, Junichi Annaka, JP 14 76
Oishi, Hiroshi Annaka, JP 82 922

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