Low dielectric constant films with high glass transition temperatures made by electron beam curing

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United States of America Patent

PATENT NO 6235353
SERIAL NO

09245060

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Abstract

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Production of a dielectric coating on a substrate whereby a poly(arylene ethers) or fluorinated poly(arylene ethers) layer is cured by exposure to electron beam radiation. A wide area electron beam is used which causes chemical reactions to occur in the polymer structure which are thought to cause crosslinks between polymer chains. The crosslinks lead to higher mechanical strength and higher glass transition temperature, lower thermal expansion coefficient, greater thermal-chemical stability and greater resistance to aggressive organic solvents. The polymer layer may also be optionally heated, thermally annealed, and/or exposed to UV actinic light.

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Patent Owner(s)

Patent OwnerAddress
ALLIED SIGNAL INCMORRISTOWN NJ

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Dong Kyu Kyoungki-Do, KR 72 553
Drage, James S Fremont, CA 26 602
Yang, Jingjun Cupertino, CA 12 252

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