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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
NAWOTEC GMBH	INDUSTRIESTR 1 64380 ROSSDORF

International Classification(s)

• G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....

• 1998 Application Filing Year
• G03F Class
• 781 Applications Filed
• 424 Patents Issued To-Date
• 54.29 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Babine, Sergey	Griesheim, DE	2	3
# of filed Patents : 2 Total Citations : 3
Dahm, Gerold	Erlenbach, DE	1	0
# of filed Patents : 1 Total Citations : 0
Holopkin, Alexey	Moscow, RU	1	0
# of filed Patents : 1 Total Citations : 0
Koops, Hans Wilfried Peter	Ober-Ramstadt, DE	11	109
# of filed Patents : 11 Total Citations : 109

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Patent Citation Ranking

• 0 Citation Count
• G03F Class

• 0 % this patent is cited more than
• 24 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: 6232046

Process for improving the contrast in the structure of 3-dimensional surfaces

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Abstract

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Three-dimensional, patterned surfaces, which were produced by dry-etching technology and have zones with different degrees of polymerization, are subjected to a time-limited dry-etching process in fluorine-containing plasma, In this context, an ablation process is used, which proceeds as a function of time, from incompletely polymerized material to completely polymerized material. Weakly polymerized regions, in particular those resulting from the proximity effect, may be removed.

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Description

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Claims

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Legal Events

 

• STCH2005
• LAPS2005
• FP2005
• REMI2004
• AS2003
• FEPP2001
• I2001
• F1998
• AS1998
• PD1995

Date	Code	Event	Description
Jun 15, 2005	STCH	INFORMATION ON STATUS: PATENT DISCONTINUATION	free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362
May 16, 2005	LAPS	LAPSE FOR FAILURE TO PAY MAINTENANCE FEES
May 15, 2005	FP	LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE	Effective Date: May 15, 2005
Dec 01, 2004	REMI	MAINTENANCE FEE REMINDER MAILED
May 15, 2003	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:DEUTSCHE TELEKOM, AG;REEL/FRAME:013897/0479 Owner name: NAWOTEC GMBH, GERMANY Effective Date: May 15, 2003
Dec 01, 2001	FEPP	FEE PAYMENT PROCEDURE	free format text: PAYER NUMBER DE-ASSIGNED (ORIGINAL EVENT CODE: RMPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY
May 15, 2001	I	Issuance
Sep 22, 1998	F	Filing
Sep 22, 1998	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KOOPS, HANS WILFRIED PETER;DAHM, GEROLD;HOLOPKIN, ALEXEY;AND OTHERS;REEL/FRAME:009483/0895;SIGNING DATES FROM 19971024 TO 19980323 Owner name: DEUTSCHE TELEKOM AG, GERMANY
Aug 30, 1995	PD	Priority Date