Single crystal pulling apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 8, 2001
Grant Date -
N/A
app pub date -
May 9, 1999
filing date -
Sep 22, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In the apparatus according to the present invention, self-weight of a single crystal is moved in soft manner when the single crystal being pulled up is gripped by grippers, and driving of pulling operation after self-weight movement is performed by a single driving source, and it is aimed to prevent contamination and dislocation of the single crystal by arranging all driving units outside a vacuum chamber for storing the single crystal. There is provided a support member 70 for supporting a portion with larger diameter 5 under a seed crystal 3, and the support member 70 is provided with a through-hole, which is communicated with outer peripheral portion via a slit 74, and it can be rotated in horizontal direction between a non-holding position and a holding position by the motor 40. Position of the support member 70 is controlled in vertical direction with respect to the seed crystal holder 2, and when it is out of vertical position control operation, the support member 70 is integrally moved with the seed crystal holder 2 in vertical direction by transmitting motive power of the seed crystal pulling means 20, and the driving sources are arranged outside the vacuum chamber for storing single crystal.
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