Chemical generator with controlled mixing and concentration feedback and adjustment
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United States of America Patent
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May 1, 2001
Grant Date -
N/A
app pub date -
Jul 7, 1998
filing date -
Jul 7, 1998
priority date (Note) -
Expired
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Abstract
The present invention is an apparatus and process for blending high purity chemicals to produce a high purity chemical mixture with circulation, purification and sensing of said chemical mixture between blending of said high purity chemicals and storage of said high purity chemicals for use, ultimately to produce a high purity chemical mixture for on-site use in treating semiconductor materials, such as at a semiconductor fabrication facility that processes silicon wafers.
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