Single crystal pull-up apparatus and single crystal pull-up method
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United States of America Patent
Stats
-
Apr 17, 2001
Grant Date -
N/A
app pub date -
Apr 21, 1999
filing date -
Sep 5, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
With relatively simple arrangement and at low cost, the present invention provides a single crystal pulling apparatus, by which it is possible to prevent a single crystal from being turned to polycrystal, to move the crystal itself smoothly and gently from a necking portion during pulling operation of the single crystal, and to reliably hold the single crystal even in case of trouble such as power suspension. The apparatus comprises a support base 13 as a dish-shaped member to support a portion with larger diameter 30 from below under a seed crystal 21, pulley means 4 for rotating the support base and being movable between a position where the support base does not support the lower end of the portion with larger diameter of the single crystal and a position where it supports the lower end of the portion with larger diameter depending on the rotation angle, pulley rotating means 3a and 3b for rotating the pulley means and moving said support base between said two positions, and pulling lifting means 3a and 3b for moving up said support base by lifting the pulley means while controlling the rate.
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