Method for the operation of an electron beam

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6214408
SERIAL NO

09173743

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method is disclosed for the operation of a high-power electron beam for the vaporization of materials in a target. With this method, static and dynamic deflection errors are corrected. First, the static and dynamic deflection errors are ascertained by means of a teach-in process for concrete spatial coordinates and concrete frequencies of the deflection currents and stored in a memory. For the later operation, this stored data is used in such a way that input geometric data for the incidence points of the electron beam is automatically recalculated into corrected current values which bring about the exact incidence onto the input points. A corresponding procedure takes place with the input of frequencies for the deflection current. The input frequencies are automatically corrected in terms of frequency and amplitude in order to eliminate the frequency-dependent attenuation effects. Both in the correction of the static and in the correction of the dynamic deflection errors it is guaranteed by suitable interpolation methods that even the spatial coordinates and frequencies not considered in the teach-in process are taken into account. Finally, a method is specified with which it is possible by mere specification of a power distribution on a crucible surface to control the electron beam such that the specified data is satisfied.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AGWILHELM-ROHN-STRASSE 25 D-63450 HANAU

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bahr, Martin Haundorf-Grafensteinberg, DE 7 26
Laux, Erik Erlensee, DE 2 12

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation