Cleaning method with hydrochloric acid-hydrogen peroxide mixture
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United States of America Patent
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Apr 10, 2001
Grant Date -
N/A
app pub date -
Oct 22, 1998
filing date -
Dec 29, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A cleaning method to inhibit the adhesion of micro particles to a member to be cleaned by decreasing an amount of generation of bubbles. In a method for cleaning a member to be cleaned by dipping the member into a cleaning bath to which a hydrochloric acid-hydrogen peroxide mixture comprising hydrochloric acid, hydrogen peroxide and water is supplied through a filter and a supplying port; the improvement is that a temperature of the hydrochloric acid, hydrogen peroxide mixture is controlled within the range of 20.degree.to 45.degree. C.
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