Thin board holding device and method of and apparatus for measuring thickness of thin board

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United States of America Patent

PATENT NO 6212786
SERIAL NO

08837978

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A thin board holding device 2A for holding a thin board in a plane state to measure the thickness of a thin board is disclosed, which has a number of spot supports 3 with adsorbing portion for holding a thin board 1 attached by suction to the top. The thin board 1 is held in a multiple point support fashion to the spot supports 3. By moving a measuring terminal of a measuring instrument to a measuring point on the thin board, which has one surface of the thin board 1 set on the thin board holding device 2A, the level of the other surface of the thin board 1 from a reference surface A supporting the thin board holding device at a reference position is measured. The dimension from the reference position A to a thin board adsorption surface 3a of the spot support 3 is used as a computational constant, and the thickness of the thin board is calculated from the measured level of the other surface of the thin board 1 and the computational constant.

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Patent Owner(s)

Patent OwnerAddress
KURODA PRECISION INDUSTRIES LTD580-16 HORIKAWA-CHO SAIWAI-KU KAWASAKI-SHI KANAGAWA 212-8560

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Naoi, Kaoru Kawasaki, JP 4 17

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