Coaxial resonator microwave plasma generator
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United States of America Patent
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Mar 20, 2001
Grant Date -
N/A
app pub date -
Feb 22, 1999
filing date -
Mar 8, 1996
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Abstract
In a device for the production of powerful microwave plasmas, the resonator is designed as a coaxial resonator with inner and outer conductors. The microwaves are coupled into the plasma chamber via the boundaries of the coaxial resonator.
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