Microwave plasma generator with the short cross-sectional side of the resonator parallel to the chamber axis
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United States of America Patent
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Mar 6, 2001
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N/A
app pub date -
Feb 1, 1999
filing date -
Jan 5, 1996
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Abstract
A device for the production of microwave plasmas with a microwave generator 1 and its coupling system to a waveguide resonator 5 which encloses a plasma chamber 7 is proposed, the short side of the cross-section of the resonator 5 lying parallel, facing the z axis, in the common wall with the chamber 7, and the microwave power being coupled from the resonator 5 into the chamber 7 via coupling points 6 in this short cross-sectional side. The coupling points are preferably formed as azimuthal slot couplers in the common wall of 5 and 7. The reference numbers relate to FIG. 1.
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