Method for fabrication of wavelength selective electro-optic grating for DFB/DBR lasers
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United States of America Patent
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Feb 27, 2001
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N/A
app pub date -
Dec 21, 1993
filing date -
Dec 21, 1993
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Abstract
A method is described for the preparation of a DFB/DBR laser which includes an electro-optic grating formed by periodically modulating the index of refraction of the cladding employed. The method involves depositing a waveguide upon a semi-insulating or doped substrate and then depositing an active layer upon the resultant structure. The active layer is subsequently selectively etched and a cladding material deposited adjacent thereto and electrically isolated therefrom. The cladding is then selectively patterned with a conductive material by photolithographic techniques to yield a grating to periodically modulate the index of refraction.
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