Fluid control valve and fluid supply/exhaust system
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United States of America Patent
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Feb 27, 2001
Grant Date -
N/A
app pub date -
Jul 23, 1999
filing date -
Dec 1, 1996
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm.sup.2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member 'a' fixed around the rod-shaped shaft. The member 'a' is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member 'a' up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.
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