Importance

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Abstract

A charge-coupled imaging device (FIG. 3) is thinned to allow for backside illumination. The device is further enhanced using ion implantation techniques to establish an electrical field (44) at the back surface, which functions to drive free electrons to potential wells generated beneath a gate structure (40) on the front surface. The device structure allows for both front side and backside illumination and is useful as a imaging device in applications where it is necessary to combine images from two different optical sources. The imaging device is particularly useful in terrestrial guidance systems (FIG. 5) where the imaging device is used to detect guide stars from a large guide star field. In such systems, the imaging device must be translated within an X-Y plane in order to cover the entire guide star field. In order to accurately know the position of the imaging device, optical fiducial marks are imaged onto a side of the imaging device opposite the side receiving the guide star photons. Using the two-sided imaging device allows for the elimination of optical elements necessary for combining the optical signals, particular the use of beam splitters.

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First Claim