Optical device for measuring a surface characteristic of an object by multi-color interferometry
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United States of America Patent
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Jan 30, 2001
Grant Date -
N/A
app pub date -
Mar 15, 1999
filing date -
Mar 15, 1999
priority date (Note) -
Expired
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Abstract
An interferometer having a light beam source that produces a plurality of separate and distinct wavelengths of light. Optic fibers are used to transport the wavelengths of light toward an object surface and to allow light reflected from the object to pass through a polarizer to improve the polarization ratio of the reflected light to determine a characteristic of the object surface.
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