Wire saw control method and wire saw

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United States of America Patent

PATENT NO 6178961
SERIAL NO

09492839

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Abstract

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A sensor measures a displacement of a sensor, and a control part of a wire saw calculates a sliding load in accordance with the measured displacement and an initial tension of the wire. Then, the control part compares the calculated cutting load with a preset reference value, and controls an ingot feed speed for a drive unit of a workpiece feed table in accordance with the results of the comparison.

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Patent Owner(s)

Patent OwnerAddress
SUPER SILICON CRYSTAL RESEARCH INSTITUTE CORPANNAKA-SHI GUNMA-KEN 379-0125

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asakawa, Keiichiro Annaka, JP 11 103
Kawarai, Hiroshi Mitaka, JP 1 7
Matsuzaki, Junichi Annaka, JP 14 76
Nagatsuka, Shinji Mitaka, JP 5 54
Oishi, Hiroshi Annaka, JP 82 922
Okubo, Shigeru Mitaka, JP 5 26

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