Method for improving crystalline thin films with a contoured beam pulsed laser

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United States of America Patent

PATENT NO 6176922
SERIAL NO

09413707

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Abstract

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A method is presented for crystallizing a thin film on a substrate by generating a beam of pulsed optical energy, countouring the intensity profile of the beam, and illuminating the thin film with the beam to crystallize the thin film into a single crystal lattice structure.

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Patent Owner(s)

Patent OwnerAddress
NAVY GOVERNMENT OF THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE THEONE LIBERTY CENTER 875 NORTH RANDOLPH STREET SUITE 1425 OFFICE OF NAVAL RESEARCH ONR/NRL ARLINGTON VA USA 22203

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aklufi, Monti E San Diego, CA 15 326
Russell, Stephen D San Diego, CA 117 1869

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