Method of removing surface oxides found on a titanium oxynitride layer using a nitrogen containing plasma
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United States of America Patent
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Jan 2, 2001
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N/A
app pub date -
Nov 21, 1997
filing date -
Nov 22, 1996
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Abstract
The invention consists in a method of filling recesses in a surface layer of a workpiece with conductive material including the steps of: forming a barrier layer on the surface; depositing a layer of conductive material on to the barrier layer; and forcing, flowing or drifting the conductive material into the recesses characterized in that the barrier layer includes Oxygen or is oxidized and oxidized material in the surface of the layer is nitrided prior to the deposition of the conductive material.
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