Substrate support element
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Dec 19, 2000
Grant Date -
N/A
app pub date -
Jul 21, 1999
filing date -
Jul 21, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A self-aligning mating structure of a substrate support element is connected to an alignment guide. The combination of the self-aligning mating structure and the alignment guide assures that the element properly seats in a complementary mating structure shaped opening in a susceptor as the susceptor is moved into the processing position. An end of the substrate support element opposite to and removed from the self-aligning mating structure is weighted. Thus, the substrate support element remains properly seated in the susceptor throughout the process cycle. The end of the substrate support element opposite to and removed from the self-aligning mating structure also includes a support structure. As the susceptor is lowered from the processing position to the load/unload position, the support structure contacts the bottom of the reaction chamber or other surface in the reaction chamber. As the susceptor is lowered further, the self-aligning mating structure that includes a substrate support tab is positioned above and separated from the susceptor.
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