Noncontact capacitance measuring device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Nov 21, 2000
Grant Date -
N/A
app pub date -
Mar 19, 1999
filing date -
Mar 27, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for conducting noncontact capacitance versus voltage measurements over a flat surface of a test wafer comprises a capacitance measuring head mounted on a positioning arm. The positioning arm is kinematically mounted and positions the measuring head over the test wafer. The capacitance measuring head has a plurality of electrically separate capacitor plates, one for use in making the capacitance versus voltage measurements and the remaining plates for providing capacitive position signals. Actuators responsive to the position signals place the measuring head very close to and substantially parallel to the surface of the test wafer.
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