Oxide film forming method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Nov 14, 2000
Issued Date -
N/A
app pub date -
Jul 9, 1996
filing date -
Aug 19, 1991
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Vacuum processing equipment capable of preventing particles from sticking to objects to be processed in vacuum vessels. The vacuum equipment comprises a series of vacuum vessels separated by doors, and the pressure in the vessels are reducible respectively. The vessels are so configured that objects to be processed are movable among them, and there is provided light projection means for projecting ultra rays on gases introduced to at least of the vessels.
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