Seed crystals, seed crystal holders, and a method for pulling a single crystal

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United States of America Patent

PATENT NO 6139632
SERIAL NO

09430166

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Abstract

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When a pulled single crystal becomes heavier, the strength of a seed crystal holder made of a carbon material is not sufficient, leading to falling of the single crystal. On the other hand, a seed crystal holder made of metal causes heavy metal contamination, or the strength thereof deteriorates early because of thermal fatigue. Accordingly, a seed crystal holder, comprising an inner cylindrical body made of metal which directly holds a seed crystal, and a carbon cylindrical body arranged around the inner cylindrical body which covers the periphery thereof, is used.

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO MITSUBISHI SILICON CORPORATION2-1 SHIBAURA 1-CHOME MINATO-KU TOKYO 105-8634

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Izumi, Teruo Hyogo pref., JP 42 185

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