Method for reducing ESD and imaging damage during focused ion beam definition of magnetoresistive head write track width
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United States of America Patent
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Oct 24, 2000
Grant Date -
N/A
app pub date -
Dec 29, 1997
filing date -
Dec 29, 1997
priority date (Note) -
Expired
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Abstract
A magnetoresistive read/recording head for use in a fixed disk drive data storage device is formed by the steps of first, photolithographically depositing the head on one surface of a slider block, second, applying, a conductive film preferably of carbon or a silicon/carbon multi-layer film over the head and onto the block surface, and then milling the write tip portion of the head with a focused ion beam. The remaining conductive film is then removed in an oxygen plasma which chemically removes the remaining conductive film. The conductive layer is transparent to the focused ion beam and conducts electrostatic charge away from the head during the milling operation thus preventing electrostatic discharges from occurring which otherwise would damage the head.
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