Scanning probe microscope with multimode head

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United States of America Patent

PATENT NO 6130427
SERIAL NO

08828771

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Abstract

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An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

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Patent Owner(s)

  • BRUKER NANO, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alexander, John Sunnyvale, CA 64 3039
Kirk, Michael San Jose, CA 25 427
Linker, Frederick I Menlo Park, CA 7 325
Park, Sang-Il Palo Alto, CA 220 5653
Park, Sung Saratoga, CA 45 1003
Smith, Ian R Los Gatos, CA 25 992

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