Surface acoustic wave and bulk acoustic wave devices using a Zn.sub.(1-X) Y.sub.x O piezoelectric layer device
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United States of America Patent
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Oct 3, 2000
Grant Date -
N/A
app pub date -
May 7, 1998
filing date -
May 9, 1997
priority date (Note) -
Expired
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Abstract
The SAW device comprises a diamond or quartz substrate as a wave propagation layer, a piezoelectric layer on the wave propagation layer and at least one interdigitated electrode on the piezoelectric layer.
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