Probe holder for low voltage, low current measurements in a water probe station
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United States of America Patent
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Sep 26, 2000
Grant Date -
N/A
app pub date -
Aug 31, 1998
filing date -
Aug 31, 1998
priority date (Note) -
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Abstract
A probe holder for a wafer probe station is comprised of a pair of over-and-under rigid extensions, one of which receives the probe shank and the other of which is connected to the probe to make a Kelvin connection. The two coaxial extensions are supported by a vertical tube which contains a pair of coaxial cables connected to triaxial cables outside of the probe station enclosure.
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